Leybold Vacuum Pump TURBOVAC 90iX DN63ISO-K

Did all LEDs come on sequentially?

Enter the maximum starting pressure for the turbomolecular pump.

Switch on the turbomolecular pump via pins 7 and 8 of the socket REMOTE (X1).

Is the turbomolecular pump accelerating?

Is the green LED permanently lit indicating normal operation?

Clean the turbomolecular pump of dust with a dry cloth if required

Check for grime inside the converter

Contact Leybold Service Department for converter cleaning if grime is detected

4.1 Media compatibility / purge gas

0.4 Hazards caused by materials and substances

Ensure the forevacuum line is tight

Check for hazardous gases escaping at leaks

Verify that gases being pumped do not react with air or humidity

Perform a leak search after installing the pump or after service work

Verify the pump's integral leak rate is < 1·10-8 mbar·l/s upon delivery

Conduct regular leak searches when pumping toxic gases

Observe Safety information 0.1.7

Exchange the rotor unit after 80,000 operating hours

Contact Leybold Service for rotor unit maintenance

Find the nearest Leybold service center address on www.leybold.com

Consult Leybold for recommendations if operating under high pump loads