'%3e%3cpath%20d='M10%2010.5V17h12.5v5.5l-21%20.038V15l8.5-4.5ZM1%206h11M6.5%202H12M5.5%2022.5V19'/%3e%3cpath%20d='M21.21%2017.012%2020.14%201.5h-4.28l-1.07%2015.512M15.516%206.49h4.967'/%3e%3c/g%3e%3cdefs%3e%3cclipPath%20id='a'%3e%3cpath%20fill='%23fff'%20d='M0%200h24v24H0z'/%3e%3c/clipPath%3e%3c/defs%3e%3c/svg%3e){kind=small}
Leybold Vacuum Pump TURBOVAC 90i DN63CF
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Manual for Leybold Vacuum Pump TURBOVAC 90i DN63CF
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Documents & Manuals
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Tensioning Guide- Belt-diagram
- C-120 pulleys
+ 13 more
Work Order Templates
Pre-built workflows to keep your asset running smoothly.
- Daily Electrical System Inspection
- Replace Roller and Pulley
- Install Engine B-120
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Procedures
Integrate maintenance plans directly into your work orders.
- Motion Industries
- Applied Industrial Technologies
- Electrical Brothers
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Parts
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- Drive Motor
- B2 Rollers
- Tensioning System
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Leybold Vacuum Pump TURBOVAC 90i DN63CF
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Maintenance Plans for Leybold Vacuum Pump Model TURBOVAC 90i DN63CF
Integrate maintenance plans directly into your work orders in MaintainX.
Pump Leak Testing
0.4 Hazards caused by materials and substances
Ensure the forevacuum line is tight
Check for hazardous gases escaping at leaks
Perform a leak search after installing the pump or after service work
Verify the pump's integral leak rate is < 1·10-8 mbar·l/s upon delivery
Conduct regular leak searches when pumping toxic gases
Pump Startup Check
4.3 Switching on
Switch on the power supply.
Verify all LEDs come on sequentially and drive electronics are running up.
Record the maximum starting pressure for the turbomolecular pump from the graph in Fig. 4.1.
Switch on the turbomolecular pump via pins 7 and 8 of the socket REMOTE (X1).
Confirm the turbomolecular pump accelerates and the green LED flashes.
Is the green LED lit permanently indicating normal operation?
Note any influences of shock and vibration when the pump is running.
In case of critical applications, was the Applications Dept. consulted?
Pump Bakeout Maintenance
4.6 Bakeout
Is the TURBOVAC equipped with a CF flange?
Enter the current pressure in mbar
Is the pressure in the range of 10-8 mbar or below?
Bake out the vacuum chamber and components installed therein
Use the flange heater to bake out the TURBOVAC
Is the rotor protected against intensive, direct heat radiation?
Measure the temperature at the forevacuum side
Is the temperature at the forevacuum side below 100 °C (212 °F)?
Pump Maintenance
4.7 Removing the pump from the system
Shut down the pump and vent as described in Sections 4.4 and 4.5.
Has the pump previously handled hazardous gases?
Implement proper precautionary measures before opening the intake or exhaust connection if hazardous gases were handled.
Observe Safety Information 0.4.6.
Disconnect the pump only when it has come to a full stop.
Is the green LED off?
Switch the mains power off and wait until the yellow power LED is off.
Disconnect any cable connections.
80000 Hourly Rotor Unit Maintenance
5 Maintenance
Observe Safety information 0.1.7
Exchange the rotor unit after 80,000 operating hours
Contact Leybold Service for maintenance work
Find the nearest Leybold service center address on www.leybold.com
Consult Leybold for recommendations if operating under high pump loads
Parts for Leybold Vacuum Pump TURBOVAC 90i DN63CF
Access the parts list for your equipment in MaintainX.
Power Supply Turbo.Power Integra Incl. 0.3 M Cable
800100V0003
Cable Turbovac I/Ix - Turbo.Power Integra 1 M
800096V0100
Cable Turbovac I/Ix - Turbo.Power Integra 3 M
800096V0300
Cable Turbovac I/Ix - Turbo.Power Integra 5 M
800096V0500
Power Supply And Control Unit Turbo.Control 300
800100V0001
Power Supply Turbo.Power Integra Incl. 0.3 M Cable
800100V0003
Cable Turbovac I/Ix - Turbo.Power Integra 1 M
800096V0100
Cable Turbovac I/Ix - Turbo.Power Integra 3 M
800096V0300
Cable Turbovac I/Ix - Turbo.Power Integra 5 M
800096V0500
Power Supply And Control Unit Turbo.Control 300
800100V0001
Power Supply Turbo.Power Integra Incl. 0.3 M Cable
800100V0003
Cable Turbovac I/Ix - Turbo.Power Integra 1 M
800096V0100
Cable Turbovac I/Ix - Turbo.Power Integra 3 M
800096V0300
Cable Turbovac I/Ix - Turbo.Power Integra 5 M
800096V0500
Power Supply And Control Unit Turbo.Control 300
800100V0001
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'%20stroke-width='2.05034'/%3e%3cpath%20d='M43.601%2020.8897C43.2688%2019.252%2042.7312%2017.6627%2042.001%2016.1597'%20stroke='url(%23paint1_linear_4912_14668)'%20stroke-width='2.05034'/%3e%3cpath%20d='M40.001%2012.8882C38.8627%2011.3731%2037.516%2010.0265%2036.001%208.88818'%20stroke='url(%23paint2_linear_4912_14668)'%20stroke-width='2.05034'/%3e%3cpath%20d='M32.729%206.89053C31.2266%206.1604%2029.638%205.62282%2028.001%205.29053'%20stroke='url(%23paint3_linear_4912_14668)'%20stroke-width='2.05034'/%3e%3cpath%20d='M24.001%2014.8901V24.8901L32.001%2032.8901'%20stroke='url(%23paint4_linear_4912_14668)'%20stroke-width='2.05034'/%3e%3cdefs%3e%3clinearGradient%20id='paint0_linear_4912_14668'%20x1='4'%20y1='25'%20x2='44'%20y2='25'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint1_linear_4912_14668'%20x1='3.5'%20y1='20.8897'%20x2='44'%20y2='20.8897'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint2_linear_4912_14668'%20x1='3.5'%20y1='12.8882'%20x2='44.5'%20y2='12.8882'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint3_linear_4912_14668'%20x1='6.5'%20y1='6.89053'%20x2='43.5'%20y2='6.89053'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint4_linear_4912_14668'%20x1='5'%20y1='32.8901'%20x2='44'%20y2='32.8901'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3c/defs%3e%3c/svg%3e){kind=small}
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'%20stroke-width='2.05034'/%3e%3cpath%20d='M46.667%2041.7231C46.667%2044.5079%2045.5607%2047.1786%2043.5916%2049.1478C41.6225%2051.1169%2038.9518%2052.2231%2036.167%2052.2231C33.3822%2052.2231%2030.7115%2051.1169%2028.7424%2049.1478C26.7732%2047.1786%2025.667%2044.5079%2025.667%2041.7231C25.667%2038.9384%2026.7732%2036.2677%2028.7424%2034.2985C30.7115%2032.3294%2033.3822%2031.2231%2036.167%2031.2231C38.9518%2031.2231%2041.6225%2032.3294%2043.5916%2034.2985C45.5607%2036.2677%2046.667%2038.9384%2046.667%2041.7231Z'%20stroke='url(%23paint1_linear_4912_14680)'%20stroke-width='2.05034'/%3e%3cpath%20d='M37.334%2035.8896V40.5563H42.0007'%20stroke='url(%23paint2_linear_4912_14680)'%20stroke-width='2.05034'/%3e%3cdefs%3e%3clinearGradient%20id='paint0_linear_4912_14680'%20x1='5'%20y1='52.2231'%20x2='51'%20y2='52.2231'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint1_linear_4912_14680'%20x1='5'%20y1='52.2231'%20x2='47'%20y2='52.2231'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint2_linear_4912_14680'%20x1='5'%20y1='40.5563'%20x2='52.5'%20y2='40.5563'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3c/defs%3e%3c/svg%3e){kind=small}
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'%20stroke-width='2.05034'/%3e%3cpath%20d='M13.9995%2024.2231C13.9995%2029.1738%2015.9662%2033.9217%2019.4669%2037.4224C22.9675%2040.9231%2027.7155%2042.8897%2032.6662%2042.8897C37.6169%2042.8897%2042.3648%2040.9231%2045.8655%2037.4224C49.3662%2033.9217%2051.3328%2029.1738%2051.3328%2024.2231C51.3328%2019.2724%2049.3662%2014.5244%2045.8655%2011.0237C42.3648%207.52306%2037.6169%205.5564%2032.6662%205.5564C27.7155%205.5564%2022.9675%207.52306%2019.4669%2011.0237C15.9662%2014.5244%2013.9995%2019.2724%2013.9995%2024.2231Z'%20stroke='url(%23paint1_linear_4912_14674)'%20stroke-width='2.05034'/%3e%3cpath%20d='M32.6665%2017.2231V12.5564'%20stroke='url(%23paint2_linear_4912_14674)'%20stroke-width='2.05034'/%3e%3cpath%20d='M32.6665%2035.8898V31.2231'%20stroke='url(%23paint3_linear_4912_14674)'%20stroke-width='2.05034'/%3e%3cpath%20d='M37.9165%2020.7231V19.5565C37.9165%2018.9376%2037.6707%2018.3441%2037.2331%2017.9066C36.7955%2017.469%2036.202%2017.2231%2035.5832%2017.2231H29.7498C29.131%2017.2231%2028.5375%2017.469%2028.0999%2017.9066C27.6623%2018.3441%2027.4165%2018.9376%2027.4165%2019.5565V20.6018C27.4166%2021.1326%2027.5977%2021.6475%2027.9298%2022.0615C28.262%2022.4756%2028.7254%2022.764%2029.2435%2022.8791L36.0895%2024.4005C36.6077%2024.5157%2037.071%2024.8041%2037.4032%2025.2181C37.7353%2025.6321%2037.9164%2026.147%2037.9165%2026.6778V28.8898C37.9165%2029.5086%2037.6707%2030.1021%2037.2331%2030.5397C36.7955%2030.9773%2036.202%2031.2231%2035.5832%2031.2231H29.7498C29.131%2031.2231%2028.5375%2030.9773%2028.0999%2030.5397C27.6623%2030.1021%2027.4165%2029.5086%2027.4165%2028.8898V27.7231'%20stroke='url(%23paint4_linear_4912_14674)'%20stroke-width='2.05034'/%3e%3cdefs%3e%3clinearGradient%20id='paint0_linear_4912_14674'%20x1='5'%20y1='33.5'%20x2='50'%20y2='33.5'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint1_linear_4912_14674'%20x1='5'%20y1='42.8897'%20x2='48.5'%20y2='42.8897'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint2_linear_4912_14674'%20x1='5'%20y1='17.2231'%20x2='52.5'%20y2='17.2231'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint3_linear_4912_14674'%20x1='3.5'%20y1='35.8898'%20x2='50.5'%20y2='35.8898'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint4_linear_4912_14674'%20x1='3'%20y1='31.2231'%20x2='52'%20y2='31.2231'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3c/defs%3e%3c/svg%3e){kind=small}
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'%3e%3cpath%20fill='url(%23b)'%20d='M66.008%2080.068c-5.084-.786-9.763-3.834-12.442-8.68a16.942%2016.942%200%200%201-1.87-5.18c1.096.19%202.203.476%203.298.87%206.525%202.333%2010.836%207.68%2011.014%2012.99ZM51.47%2061.576c.488-5.524%203.62-10.716%208.847-13.597a17.132%2017.132%200%200%201%2011.335-1.882c-.798%208.145-7.43%2014.848-16.038%2015.599-1.417.119-2.799.07-4.144-.12Zm28.564-11.478a17.513%2017.513%200%200%201%203.727%204.62c4.608%208.335%201.584%2018.813-6.75%2023.409a16.988%2016.988%200%200%201-4.359%201.679%2019.624%2019.624%200%200%201-3.977-12.776c.346-7.561%204.942-13.931%2011.36-16.932Z'/%3e%3cpath%20fill='%23110F0D'%20fill-rule='evenodd'%20d='M142.831%2048.324h4.977V77.03h-4.977V48.324Zm27.278%2013.002c.322%201.048.453%202.263.453%203.62v12.073h-4.787V66.208c0-.75-.047-1.572-.154-2.143-.453-2.382-1.822-3.572-4.215-3.572-2.31%200-3.882%201.274-4.43%203.476-.143.596-.226%201.405-.226%202.25v10.8h-4.787V56.623h4.477v2.989c1.536-2.5%203.906-3.43%206.371-3.43%203.488%200%206.263%201.68%207.298%205.144Zm24.636%207.323c0%203.882-2.358%206.525-5.763%207.727-1.298.453-2.632.643-4.62.643h-10.169V48.324h9.085c1.691%200%203.156.143%204.049.38%203.465.93%205.727%203.68%205.727%207.335%200%202.441-.81%204.156-2.762%205.644%202.905%201.417%204.453%203.727%204.453%206.966Zm-15.634-8.656h4.584c1.024%200%201.917-.143%202.536-.417%201.215-.548%201.905-1.608%201.905-3.167%200-1.548-.643-2.572-1.845-3.132-.691-.31-1.762-.452-2.763-.452h-4.417v7.168Zm10.716%208.465c0-1.536-.893-3.37-3.227-3.893-.428-.095-1.036-.143-1.571-.143h-5.918v8.085h5.501c.56%200%201.429-.048%201.953-.167%201.94-.453%203.262-1.846%203.262-3.882Zm47.747-11.847-8.097%2020.408h-4.429l-8.109-20.408h5.191l5.192%2014.574%205.108-14.574h5.144Zm-20.218%2010.002c0%20.69-.036%201.262-.155%201.94h-15.943c.631%202.87%202.714%204.728%205.882%204.728%202.131%200%203.607-.882%204.703-2.525h4.87c-1.762%204.144-5.204%206.692-9.657%206.692-6.084%200-10.537-4.858-10.537-10.49%200-6.108%204.524-10.776%2010.335-10.776%206.239%200%2010.442%204.954%2010.502%2010.43Zm-4.763-1.405c-.333-2.846-2.643-4.858-5.691-4.858-2.894%200-5.287%201.929-5.621%204.858h11.312Zm-72.667%203.44c0%204.787-3.287%208.371-9.419%208.371H119.363V64.66c-1.917.274-3.87.69-5.811%201.238l4.537%2011.121h-5.418l-3.596-9.585c-5.144%202.084-10.085%205.216-14.217%209.585h-4.786L101.8%2048.312h4.56l5.68%2013.883a44.112%2044.112%200%200%201%207.323-1.774V48.312h9.084c1.703%200%203.156.143%204.061.393%203.453.929%205.727%203.667%205.727%207.323%200%201.917-.738%204.179-2.81%205.691%203.06%201.56%204.501%204.025%204.501%206.93Zm-15.634-8.667a62.664%2062.664%200%200%201%202.06-.036c1.703.012%203.239.131%204.608.37%201.441-.549%202.357-1.727%202.357-3.537%200-1.941-.881-3.144-2.488-3.667-.548-.18-1.358-.286-2.322-.286h-4.215v7.156Zm-16.55%203.905-3.715-9.894-6.394%2016.502c2.833-2.595%206.263-4.858%2010.109-6.608Zm27.254%204.74c0-2.775-3.131-4.347-8.513-4.418-.715%200-1.441.011-2.191.047v8.252h5.918c2.548%200%204.786-1.37%204.786-3.882Z'%20clip-rule='evenodd'/%3e%3c/g%3e%3cdefs%3e%3clinearGradient%20id='b'%20x1='51.47'%20x2='85.916'%20y1='62.946'%20y2='62.946'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23CD9F28'/%3e%3cstop%20offset='1'%20stop-color='%23ECD80B'/%3e%3c/linearGradient%3e%3cclipPath%20id='a'%3e%3cpath%20fill='%23fff'%20d='M51.47%2045.728h186.104V80.14H51.47z'/%3e%3c/clipPath%3e%3c/defs%3e%3c/svg%3e)
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