'%3e%3cpath%20d='M10%2010.5V17h12.5v5.5l-21%20.038V15l8.5-4.5ZM1%206h11M6.5%202H12M5.5%2022.5V19'/%3e%3cpath%20d='M21.21%2017.012%2020.14%201.5h-4.28l-1.07%2015.512M15.516%206.49h4.967'/%3e%3c/g%3e%3cdefs%3e%3cclipPath%20id='a'%3e%3cpath%20fill='%23fff'%20d='M0%200h24v24H0z'/%3e%3c/clipPath%3e%3c/defs%3e%3c/svg%3e){kind=small}
Leybold Vacuum Pump TURBOVAC 90iX DN63CF
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Manual for Leybold Vacuum Pump TURBOVAC 90iX DN63CF
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Get instant access to all the maintenance information you need. Empower technicians to perform preventive maintenance with asset packages, ready to use right out of the box.
Documents & Manuals
Find all the essential guides in one place.
Tensioning Guide- Belt-diagram
- C-120 pulleys
+ 13 more
Work Order Templates
Pre-built workflows to keep your asset running smoothly.
- Daily Electrical System Inspection
- Replace Roller and Pulley
- Install Engine B-120
+ 29 more
Procedures
Integrate maintenance plans directly into your work orders.
- Motion Industries
- Applied Industrial Technologies
- Electrical Brothers
+ 5 more
Parts
Access the parts list for your equipment in MaintainX.
- Drive Motor
- B2 Rollers
- Tensioning System
+ 40 more
Leybold Vacuum Pump TURBOVAC 90iX DN63CF
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Maintenance Plans for Leybold Vacuum Pump Model TURBOVAC 90iX DN63CF
Integrate maintenance plans directly into your work orders in MaintainX.
1 Yearly Air Filter Maintenance
4.1 Media compatibility / purge gas
Verify media compatibility
Check purge gas type
Change the air filters
Pump Bakeout Maintenance
4.6 Bakeout
Ensure the following conditions are met before bakeout
Use the flange heater for TURBOVAC bakeout
Is the rotor protected against intensive, direct heat radiation?
Enter the maximum temperature for components attached directly to the forevacuum side
Is the pump operated with water cooling during bakeout?
80000 Hourly Rotor Unit Maintenance
5 Maintenance
WARNING — Observe Safety information 0.1.7
Exchange the rotor unit after 80,000 operating hours
Contact Leybold service center
Is the pump operating under high load conditions?
Consult Leybold for recommendations
Cooling Water Quality Check
Water Appearance Check
Measure suspended matter concentration
Measure particle size
Measure electrical conductivity
Measure pH value
Measure total hardness
Check for aggressive carbon dioxide presence
Measure chloride concentration
Measure sulphate concentration
Pump Leak Testing
0.4 Hazards caused by materials and substances
Ensure the forevacuum line is tight
Check for hazardous gases escaping at leaks
Verify that gases being pumped do not react with air or humidity
Perform a leak search after installing the pump
Conduct a leak search after service work on the vacuum system
Verify the pump's integral leak rate is < 1·10-8 mbar·l/s upon delivery
Perform regular leak searches when pumping toxic gases
Parts for Leybold Vacuum Pump TURBOVAC 90iX DN63CF
Access the parts list for your equipment in MaintainX.
Power Supply Turbo.Power Integra Incl. 0.3 M Cable
800100V0003
Cable Turbovac I/Ix - Turbo.Power Integra 1 M
800096V0100
Cable Turbovac I/Ix - Turbo.Power Integra 3 M
800096V0300
Cable Turbovac I/Ix - Turbo.Power Integra 5 M
800096V0500
Power Supply And Control Unit Turbo.Control 300
800100V0001
Power Supply Turbo.Power Integra Incl. 0.3 M Cable
800100V0003
Cable Turbovac I/Ix - Turbo.Power Integra 1 M
800096V0100
Cable Turbovac I/Ix - Turbo.Power Integra 3 M
800096V0300
Cable Turbovac I/Ix - Turbo.Power Integra 5 M
800096V0500
Power Supply And Control Unit Turbo.Control 300
800100V0001
Power Supply Turbo.Power Integra Incl. 0.3 M Cable
800100V0003
Cable Turbovac I/Ix - Turbo.Power Integra 1 M
800096V0100
Cable Turbovac I/Ix - Turbo.Power Integra 3 M
800096V0300
Cable Turbovac I/Ix - Turbo.Power Integra 5 M
800096V0500
Power Supply And Control Unit Turbo.Control 300
800100V0001
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'%20stroke-width='2.05034'/%3e%3cpath%20d='M43.601%2020.8897C43.2688%2019.252%2042.7312%2017.6627%2042.001%2016.1597'%20stroke='url(%23paint1_linear_4912_14668)'%20stroke-width='2.05034'/%3e%3cpath%20d='M40.001%2012.8882C38.8627%2011.3731%2037.516%2010.0265%2036.001%208.88818'%20stroke='url(%23paint2_linear_4912_14668)'%20stroke-width='2.05034'/%3e%3cpath%20d='M32.729%206.89053C31.2266%206.1604%2029.638%205.62282%2028.001%205.29053'%20stroke='url(%23paint3_linear_4912_14668)'%20stroke-width='2.05034'/%3e%3cpath%20d='M24.001%2014.8901V24.8901L32.001%2032.8901'%20stroke='url(%23paint4_linear_4912_14668)'%20stroke-width='2.05034'/%3e%3cdefs%3e%3clinearGradient%20id='paint0_linear_4912_14668'%20x1='4'%20y1='25'%20x2='44'%20y2='25'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint1_linear_4912_14668'%20x1='3.5'%20y1='20.8897'%20x2='44'%20y2='20.8897'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint2_linear_4912_14668'%20x1='3.5'%20y1='12.8882'%20x2='44.5'%20y2='12.8882'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint3_linear_4912_14668'%20x1='6.5'%20y1='6.89053'%20x2='43.5'%20y2='6.89053'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint4_linear_4912_14668'%20x1='5'%20y1='32.8901'%20x2='44'%20y2='32.8901'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3c/defs%3e%3c/svg%3e){kind=small}
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'%20stroke-width='2.05034'/%3e%3cpath%20d='M46.667%2041.7231C46.667%2044.5079%2045.5607%2047.1786%2043.5916%2049.1478C41.6225%2051.1169%2038.9518%2052.2231%2036.167%2052.2231C33.3822%2052.2231%2030.7115%2051.1169%2028.7424%2049.1478C26.7732%2047.1786%2025.667%2044.5079%2025.667%2041.7231C25.667%2038.9384%2026.7732%2036.2677%2028.7424%2034.2985C30.7115%2032.3294%2033.3822%2031.2231%2036.167%2031.2231C38.9518%2031.2231%2041.6225%2032.3294%2043.5916%2034.2985C45.5607%2036.2677%2046.667%2038.9384%2046.667%2041.7231Z'%20stroke='url(%23paint1_linear_4912_14680)'%20stroke-width='2.05034'/%3e%3cpath%20d='M37.334%2035.8896V40.5563H42.0007'%20stroke='url(%23paint2_linear_4912_14680)'%20stroke-width='2.05034'/%3e%3cdefs%3e%3clinearGradient%20id='paint0_linear_4912_14680'%20x1='5'%20y1='52.2231'%20x2='51'%20y2='52.2231'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint1_linear_4912_14680'%20x1='5'%20y1='52.2231'%20x2='47'%20y2='52.2231'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint2_linear_4912_14680'%20x1='5'%20y1='40.5563'%20x2='52.5'%20y2='40.5563'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3c/defs%3e%3c/svg%3e){kind=small}
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Keep your assets running longer and more reliably, with standardized maintenance workflows from OEM manuals.
'%20stroke-width='2.05034'/%3e%3cpath%20d='M13.9995%2024.2231C13.9995%2029.1738%2015.9662%2033.9217%2019.4669%2037.4224C22.9675%2040.9231%2027.7155%2042.8897%2032.6662%2042.8897C37.6169%2042.8897%2042.3648%2040.9231%2045.8655%2037.4224C49.3662%2033.9217%2051.3328%2029.1738%2051.3328%2024.2231C51.3328%2019.2724%2049.3662%2014.5244%2045.8655%2011.0237C42.3648%207.52306%2037.6169%205.5564%2032.6662%205.5564C27.7155%205.5564%2022.9675%207.52306%2019.4669%2011.0237C15.9662%2014.5244%2013.9995%2019.2724%2013.9995%2024.2231Z'%20stroke='url(%23paint1_linear_4912_14674)'%20stroke-width='2.05034'/%3e%3cpath%20d='M32.6665%2017.2231V12.5564'%20stroke='url(%23paint2_linear_4912_14674)'%20stroke-width='2.05034'/%3e%3cpath%20d='M32.6665%2035.8898V31.2231'%20stroke='url(%23paint3_linear_4912_14674)'%20stroke-width='2.05034'/%3e%3cpath%20d='M37.9165%2020.7231V19.5565C37.9165%2018.9376%2037.6707%2018.3441%2037.2331%2017.9066C36.7955%2017.469%2036.202%2017.2231%2035.5832%2017.2231H29.7498C29.131%2017.2231%2028.5375%2017.469%2028.0999%2017.9066C27.6623%2018.3441%2027.4165%2018.9376%2027.4165%2019.5565V20.6018C27.4166%2021.1326%2027.5977%2021.6475%2027.9298%2022.0615C28.262%2022.4756%2028.7254%2022.764%2029.2435%2022.8791L36.0895%2024.4005C36.6077%2024.5157%2037.071%2024.8041%2037.4032%2025.2181C37.7353%2025.6321%2037.9164%2026.147%2037.9165%2026.6778V28.8898C37.9165%2029.5086%2037.6707%2030.1021%2037.2331%2030.5397C36.7955%2030.9773%2036.202%2031.2231%2035.5832%2031.2231H29.7498C29.131%2031.2231%2028.5375%2030.9773%2028.0999%2030.5397C27.6623%2030.1021%2027.4165%2029.5086%2027.4165%2028.8898V27.7231'%20stroke='url(%23paint4_linear_4912_14674)'%20stroke-width='2.05034'/%3e%3cdefs%3e%3clinearGradient%20id='paint0_linear_4912_14674'%20x1='5'%20y1='33.5'%20x2='50'%20y2='33.5'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint1_linear_4912_14674'%20x1='5'%20y1='42.8897'%20x2='48.5'%20y2='42.8897'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint2_linear_4912_14674'%20x1='5'%20y1='17.2231'%20x2='52.5'%20y2='17.2231'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint3_linear_4912_14674'%20x1='3.5'%20y1='35.8898'%20x2='50.5'%20y2='35.8898'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint4_linear_4912_14674'%20x1='3'%20y1='31.2231'%20x2='52'%20y2='31.2231'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3c/defs%3e%3c/svg%3e){kind=small}
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'%3e%3cpath%20fill='url(%23b)'%20d='M66.008%2080.068c-5.084-.786-9.763-3.834-12.442-8.68a16.942%2016.942%200%200%201-1.87-5.18c1.096.19%202.203.476%203.298.87%206.525%202.333%2010.836%207.68%2011.014%2012.99ZM51.47%2061.576c.488-5.524%203.62-10.716%208.847-13.597a17.132%2017.132%200%200%201%2011.335-1.882c-.798%208.145-7.43%2014.848-16.038%2015.599-1.417.119-2.799.07-4.144-.12Zm28.564-11.478a17.513%2017.513%200%200%201%203.727%204.62c4.608%208.335%201.584%2018.813-6.75%2023.409a16.988%2016.988%200%200%201-4.359%201.679%2019.624%2019.624%200%200%201-3.977-12.776c.346-7.561%204.942-13.931%2011.36-16.932Z'/%3e%3cpath%20fill='%23110F0D'%20fill-rule='evenodd'%20d='M142.831%2048.324h4.977V77.03h-4.977V48.324Zm27.278%2013.002c.322%201.048.453%202.263.453%203.62v12.073h-4.787V66.208c0-.75-.047-1.572-.154-2.143-.453-2.382-1.822-3.572-4.215-3.572-2.31%200-3.882%201.274-4.43%203.476-.143.596-.226%201.405-.226%202.25v10.8h-4.787V56.623h4.477v2.989c1.536-2.5%203.906-3.43%206.371-3.43%203.488%200%206.263%201.68%207.298%205.144Zm24.636%207.323c0%203.882-2.358%206.525-5.763%207.727-1.298.453-2.632.643-4.62.643h-10.169V48.324h9.085c1.691%200%203.156.143%204.049.38%203.465.93%205.727%203.68%205.727%207.335%200%202.441-.81%204.156-2.762%205.644%202.905%201.417%204.453%203.727%204.453%206.966Zm-15.634-8.656h4.584c1.024%200%201.917-.143%202.536-.417%201.215-.548%201.905-1.608%201.905-3.167%200-1.548-.643-2.572-1.845-3.132-.691-.31-1.762-.452-2.763-.452h-4.417v7.168Zm10.716%208.465c0-1.536-.893-3.37-3.227-3.893-.428-.095-1.036-.143-1.571-.143h-5.918v8.085h5.501c.56%200%201.429-.048%201.953-.167%201.94-.453%203.262-1.846%203.262-3.882Zm47.747-11.847-8.097%2020.408h-4.429l-8.109-20.408h5.191l5.192%2014.574%205.108-14.574h5.144Zm-20.218%2010.002c0%20.69-.036%201.262-.155%201.94h-15.943c.631%202.87%202.714%204.728%205.882%204.728%202.131%200%203.607-.882%204.703-2.525h4.87c-1.762%204.144-5.204%206.692-9.657%206.692-6.084%200-10.537-4.858-10.537-10.49%200-6.108%204.524-10.776%2010.335-10.776%206.239%200%2010.442%204.954%2010.502%2010.43Zm-4.763-1.405c-.333-2.846-2.643-4.858-5.691-4.858-2.894%200-5.287%201.929-5.621%204.858h11.312Zm-72.667%203.44c0%204.787-3.287%208.371-9.419%208.371H119.363V64.66c-1.917.274-3.87.69-5.811%201.238l4.537%2011.121h-5.418l-3.596-9.585c-5.144%202.084-10.085%205.216-14.217%209.585h-4.786L101.8%2048.312h4.56l5.68%2013.883a44.112%2044.112%200%200%201%207.323-1.774V48.312h9.084c1.703%200%203.156.143%204.061.393%203.453.929%205.727%203.667%205.727%207.323%200%201.917-.738%204.179-2.81%205.691%203.06%201.56%204.501%204.025%204.501%206.93Zm-15.634-8.667a62.664%2062.664%200%200%201%202.06-.036c1.703.012%203.239.131%204.608.37%201.441-.549%202.357-1.727%202.357-3.537%200-1.941-.881-3.144-2.488-3.667-.548-.18-1.358-.286-2.322-.286h-4.215v7.156Zm-16.55%203.905-3.715-9.894-6.394%2016.502c2.833-2.595%206.263-4.858%2010.109-6.608Zm27.254%204.74c0-2.775-3.131-4.347-8.513-4.418-.715%200-1.441.011-2.191.047v8.252h5.918c2.548%200%204.786-1.37%204.786-3.882Z'%20clip-rule='evenodd'/%3e%3c/g%3e%3cdefs%3e%3clinearGradient%20id='b'%20x1='51.47'%20x2='85.916'%20y1='62.946'%20y2='62.946'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23CD9F28'/%3e%3cstop%20offset='1'%20stop-color='%23ECD80B'/%3e%3c/linearGradient%3e%3cclipPath%20id='a'%3e%3cpath%20fill='%23fff'%20d='M51.47%2045.728h186.104V80.14H51.47z'/%3e%3c/clipPath%3e%3c/defs%3e%3c/svg%3e)
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