Leybold Vacuum Pump TURBOVAC 250i DN100CF

WARNING — Observe Safety information 0.1.7

Exchange the rotor unit after 80,000 operating hours

Is the pump operating under high load conditions?

Consult Leybold for recommendations

Clean the turbomolecular pump of dust with a dry cloth, if required.

Check if the converter has collected grime (dust, moisture) on the inside.

Ensure no grime is present to avoid malfunctions, overheating, or short circuits.

Note if Leybold Service Department assistance is required for cleaning the converter.

Is the TURBOVAC equipped with a CF flange?

Enter the current pressure in mbar

Is the pressure in the range of 10-8 mbar or below?

Bake out the vacuum chamber and components installed therein

Use the flange heater to bake out the TURBOVAC

Is the rotor protected against intensive, direct heat radiation?

Enter the temperature at the forevacuum side in °C

Is the temperature at the forevacuum side below 100 °C (212 °F)?

4.1 Media compatibility / purge gas

Ensure use of dry, filtered, oil-free air or filtered ambient air

Check filter mesh size is less than 1µm

4.7 Removing the pump from the system

Shut down the pump and vent as described in Sections 4.4 and 4.5

Observe Safety Information 0.4.6

Disconnect the pump only when it has come to a full stop

Switch the mains power off and wait until the yellow power LED is off

Disconnect any cable connections

Fasten a container of desiccant under the transport cover of the high vacuum connection

Close the pump immediately at all flange connections