Leybold Vacuum Pump TURBOVAC 250iX DN100CF

0.4 Hazards caused by materials and substances

Ensure the forevacuum line is tight

Check for potential leaks where hazardous gases can escape

Verify the pump's integral leak rate is < 1·10-8 mbar·l/s upon delivery

Conduct a leak search after installing the pump or performing service work

Perform regular leak searches when pumping toxic gases

Verify all LEDs come on sequentially and drive electronics are running up.

Record the maximum starting pressure for the turbomolecular pump from the graph in Fig. 4.1.

Switch on the turbomolecular pump via pins 7 and 8 of the socket REMOTE (X1).

Confirm the turbomolecular pump accelerates and the green LED flashes.

Is the green LED lit permanently indicating normal operation?

Ensure no shock or vibration influences are present when the pump is running.

Ensure the following conditions are met before bakeout

Use the flange heater for TURBOVAC bakeout

Is the rotor protected against intensive, direct heat radiation?

Maximum temperature for components attached directly to the forevacuum side

Operate the pump with water cooling during bakeout

Measure suspended matter concentration

Measure electrical conductivity

Check for aggressive carbon dioxide presence

Measure sulphates concentration

Clean the turbomolecular pump of dust with a dry cloth if required

Check for grime inside the converter

Contact Leybold Service Department for converter cleaning if grime is detected