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Leybold Vacuum Pump TURBOVAC T350iX DN100CF

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Leybold Vacuum Pump TURBOVAC T350iX DN100CF
Leybold Vacuum Pump TURBOVAC T350iX DN100CF

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Manual for Leybold Vacuum Pump TURBOVAC T350iX DN100CF

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Work Order Templates

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Procedures

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Parts

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Leybold Vacuum Pump TURBOVAC T350iX DN100CF

Leybold Vacuum Pump TURBOVAC T350iX DN100CF

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Maintenance Plans for Leybold Vacuum Pump Model TURBOVAC T350iX DN100CF

Integrate maintenance plans directly into your work orders in MaintainX.

Pump Bakeout Maintenance

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4.6 Bakeout

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Is the TURBOVAC equipped with a CF flange?

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Enter the current pressure in mbar

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Is the pressure in the range of 10-8 mbar or below?

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Bake out the vacuum chamber and components installed therein

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Use the flange heater to bake out the TURBOVAC

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Is the rotor protected against intensive, direct heat radiation?

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Enter the temperature at the forevacuum side in °C

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Is the temperature at the forevacuum side below 100 °C (212 °F)?

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80000 Hourly Rotor Unit Maintenance

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5 Maintenance

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WARNING — Observe Safety information 0.1.7

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Record the current operating hours of the rotor unit

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Has the rotor unit reached 80,000 operating hours?

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Is the pump operating under high load conditions?

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Contact Leybold Service for rotor unit exchange

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Record the contact details of the Leybold service center

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Consult Leybold for maintenance recommendations

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Cooling Water Quality Check

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Water Appearance Check

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Measure suspended matter concentration

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Measure particle size

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Measure electrical conductivity

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Measure pH value

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Measure total hardness

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Check for aggressive carbon dioxide presence

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Measure chloride concentration

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Measure sulphate concentration

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Bearing Maintenance

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Maintenance

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Determine if bearing replacement is required

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Contact after sales service for on-site bearing replacement

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Request a quotation for bearing replacement at Leybold Service Center

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Pump Cleaning

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5.1 Cleaning

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Is the turbomolecular pump free of dust?

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Clean the turbomolecular pump with a dry cloth if dust is present.

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Is the converter free of grime (dust, moisture) on the inside?

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Describe any grime found inside the converter.

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Was the converter cleaned by the Leybold Service Department?

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Parts for Leybold Vacuum Pump TURBOVAC T350iX DN100CF

Access the parts list for your equipment in MaintainX.

Part Name
Part Number

Power Supply Turbo.Power Integra Incl. 0.3 M Cable

800100V0003

Cable Turbovac I/Ix - Turbo.Power Integra 1 M

800096V0100

Cable Turbovac I/Ix - Turbo.Power Integra 3 M

800096V0300

Cable Turbovac I/Ix - Turbo.Power Integra 5 M

800096V0500

Power Supply And Control Unit Turbo.Control 300

800100V0001

Power Supply Turbo.Power Integra Incl. 0.3 M Cable

800100V0003

Cable Turbovac I/Ix - Turbo.Power Integra 1 M

800096V0100

Cable Turbovac I/Ix - Turbo.Power Integra 3 M

800096V0300

Cable Turbovac I/Ix - Turbo.Power Integra 5 M

800096V0500

Power Supply And Control Unit Turbo.Control 300

800100V0001

Power Supply Turbo.Power Integra Incl. 0.3 M Cable

800100V0003

Cable Turbovac I/Ix - Turbo.Power Integra 1 M

800096V0100

Cable Turbovac I/Ix - Turbo.Power Integra 3 M

800096V0300

Cable Turbovac I/Ix - Turbo.Power Integra 5 M

800096V0500

Power Supply And Control Unit Turbo.Control 300

800100V0001

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