'%3e%3cpath%20d='M10%2010.5V17h12.5v5.5l-21%20.038V15l8.5-4.5ZM1%206h11M6.5%202H12M5.5%2022.5V19'/%3e%3cpath%20d='M21.21%2017.012%2020.14%201.5h-4.28l-1.07%2015.512M15.516%206.49h4.967'/%3e%3c/g%3e%3cdefs%3e%3cclipPath%20id='a'%3e%3cpath%20fill='%23fff'%20d='M0%200h24v24H0z'/%3e%3c/clipPath%3e%3c/defs%3e%3c/svg%3e){kind=small}
Leybold Vacuum Pump TURBOVAC 350i DN100CF
Need answers fast?
Explore the manual using AI.
Turn manuals into instant answers
with your AI-powered assistantTurn manuals into instant answers
with your AI-powered assistant
Manual for Leybold Vacuum Pump TURBOVAC 350i DN100CF
Complete asset maintenance, one click away
Get instant access to all the maintenance information you need. Empower technicians to perform preventive maintenance with asset packages, ready to use right out of the box.
Documents & Manuals
Find all the essential guides in one place.
Tensioning Guide- Belt-diagram
- C-120 pulleys
+ 13 more
Work Order Templates
Pre-built workflows to keep your asset running smoothly.
- Daily Electrical System Inspection
- Replace Roller and Pulley
- Install Engine B-120
+ 29 more
Procedures
Integrate maintenance plans directly into your work orders.
- Motion Industries
- Applied Industrial Technologies
- Electrical Brothers
+ 5 more
Parts
Access the parts list for your equipment in MaintainX.
- Drive Motor
- B2 Rollers
- Tensioning System
+ 40 more
Leybold Vacuum Pump TURBOVAC 350i DN100CF
Create an account to install this asset package.
Maintenance Plans for Leybold Vacuum Pump Model TURBOVAC 350i DN100CF
Integrate maintenance plans directly into your work orders in MaintainX.
Pump Cleaning
5.1 Cleaning
Clean the turbomolecular pump of dust with a dry cloth if required.
Check that the converter is free from grime (dust, moisture) on the inside.
Is the converter free from contamination that could lead to malfunctions, overheating, or short circuits?
Describe any contamination found inside the converter.
Contact the Leybold Service Department if cleaning of the converter is required.
Pump Bakeout Maintenance
4.6 Bakeout
Is the TURBOVAC equipped with a CF flange?
Enter the current pressure in mbar
Is the pressure in the range of 10-8 mbar or below?
Bake out the vacuum chamber and components installed therein
Use the flange heater to bake out the TURBOVAC
Protect the rotor against intensive, direct heat radiation
Is the forevacuum side being baked out?
Enter the temperature of components attached directly to the forevacuum side in °C
Pump Maintenance
4.7 Removing the pump from the system
Shut down the pump and vent as described in Sections 4.4 and 4.5.
Has the pump previously handled hazardous gases?
Implement proper precautionary measures before opening the intake or exhaust connection if hazardous gases were handled.
Observe Safety Information 0.4.6.
Disconnect the pump only when it has come to a full stop.
Is the green LED off?
Switch the mains power off and wait until the yellow power LED is off.
Disconnect any cable connections.
80000 Hourly Rotor Unit Maintenance
5 Maintenance
Observe Safety information 0.1.7
Exchange the rotor unit after 80,000 operating hours
Contact Leybold Service for rotor unit maintenance
Find the nearest Leybold service center address on www.leybold.com
Consult Leybold for recommendations if operating under high pump loads
Pump Startup Check
Switching on
Switch on the power supply.
Verify all LEDs come on sequentially and drive electronics are running up.
Read the maximum starting pressure for the turbomolecular pump from the graph in Fig. 4.1.
Switch on the turbomolecular pump via pins 7 and 8 of the socket REMOTE (X1).
Confirm the turbomolecular pump accelerates and the green LED flashes.
Does the green LED light up permanently when the pump reaches normal operation?
Safety Precautions
Ensure no shock or vibration influences the pump during operation.
Parts for Leybold Vacuum Pump TURBOVAC 350i DN100CF
Access the parts list for your equipment in MaintainX.
Power Supply Turbo.Power Integra Incl. 0.3 M Cable
800100V0003
Cable Turbovac I/Ix - Turbo.Power Integra 1 M
800096V0100
Cable Turbovac I/Ix - Turbo.Power Integra 3 M
800096V0300
Cable Turbovac I/Ix - Turbo.Power Integra 5 M
800096V0500
Power Supply And Control Unit Turbo.Control 300
800100V0001
Power Supply Turbo.Power Integra Incl. 0.3 M Cable
800100V0003
Cable Turbovac I/Ix - Turbo.Power Integra 1 M
800096V0100
Cable Turbovac I/Ix - Turbo.Power Integra 3 M
800096V0300
Cable Turbovac I/Ix - Turbo.Power Integra 5 M
800096V0500
Power Supply And Control Unit Turbo.Control 300
800100V0001
Power Supply Turbo.Power Integra Incl. 0.3 M Cable
800100V0003
Cable Turbovac I/Ix - Turbo.Power Integra 1 M
800096V0100
Cable Turbovac I/Ix - Turbo.Power Integra 3 M
800096V0300
Cable Turbovac I/Ix - Turbo.Power Integra 5 M
800096V0500
Power Supply And Control Unit Turbo.Control 300
800100V0001
Unlock efficiency
with MaintainX CoPilot
MaintainX CoPilot is your expert colleague, on call 24/7, helping your team find the answers they need to keep equipment running.
'%20stroke-width='2.05034'/%3e%3cpath%20d='M43.601%2020.8897C43.2688%2019.252%2042.7312%2017.6627%2042.001%2016.1597'%20stroke='url(%23paint1_linear_4912_14668)'%20stroke-width='2.05034'/%3e%3cpath%20d='M40.001%2012.8882C38.8627%2011.3731%2037.516%2010.0265%2036.001%208.88818'%20stroke='url(%23paint2_linear_4912_14668)'%20stroke-width='2.05034'/%3e%3cpath%20d='M32.729%206.89053C31.2266%206.1604%2029.638%205.62282%2028.001%205.29053'%20stroke='url(%23paint3_linear_4912_14668)'%20stroke-width='2.05034'/%3e%3cpath%20d='M24.001%2014.8901V24.8901L32.001%2032.8901'%20stroke='url(%23paint4_linear_4912_14668)'%20stroke-width='2.05034'/%3e%3cdefs%3e%3clinearGradient%20id='paint0_linear_4912_14668'%20x1='4'%20y1='25'%20x2='44'%20y2='25'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint1_linear_4912_14668'%20x1='3.5'%20y1='20.8897'%20x2='44'%20y2='20.8897'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint2_linear_4912_14668'%20x1='3.5'%20y1='12.8882'%20x2='44.5'%20y2='12.8882'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint3_linear_4912_14668'%20x1='6.5'%20y1='6.89053'%20x2='43.5'%20y2='6.89053'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint4_linear_4912_14668'%20x1='5'%20y1='32.8901'%20x2='44'%20y2='32.8901'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3c/defs%3e%3c/svg%3e){kind=small}
Reduce Unplanned Downtime
Ensure your team follows consistent procedures to minimize equipment failures and costly delays.
'%20stroke-width='2.05034'/%3e%3cpath%20d='M46.667%2041.7231C46.667%2044.5079%2045.5607%2047.1786%2043.5916%2049.1478C41.6225%2051.1169%2038.9518%2052.2231%2036.167%2052.2231C33.3822%2052.2231%2030.7115%2051.1169%2028.7424%2049.1478C26.7732%2047.1786%2025.667%2044.5079%2025.667%2041.7231C25.667%2038.9384%2026.7732%2036.2677%2028.7424%2034.2985C30.7115%2032.3294%2033.3822%2031.2231%2036.167%2031.2231C38.9518%2031.2231%2041.6225%2032.3294%2043.5916%2034.2985C45.5607%2036.2677%2046.667%2038.9384%2046.667%2041.7231Z'%20stroke='url(%23paint1_linear_4912_14680)'%20stroke-width='2.05034'/%3e%3cpath%20d='M37.334%2035.8896V40.5563H42.0007'%20stroke='url(%23paint2_linear_4912_14680)'%20stroke-width='2.05034'/%3e%3cdefs%3e%3clinearGradient%20id='paint0_linear_4912_14680'%20x1='5'%20y1='52.2231'%20x2='51'%20y2='52.2231'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint1_linear_4912_14680'%20x1='5'%20y1='52.2231'%20x2='47'%20y2='52.2231'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint2_linear_4912_14680'%20x1='5'%20y1='40.5563'%20x2='52.5'%20y2='40.5563'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3c/defs%3e%3c/svg%3e){kind=small}
Maximize Asset Availability
Keep your assets running longer and more reliably, with standardized maintenance workflows from OEM manuals.
'%20stroke-width='2.05034'/%3e%3cpath%20d='M13.9995%2024.2231C13.9995%2029.1738%2015.9662%2033.9217%2019.4669%2037.4224C22.9675%2040.9231%2027.7155%2042.8897%2032.6662%2042.8897C37.6169%2042.8897%2042.3648%2040.9231%2045.8655%2037.4224C49.3662%2033.9217%2051.3328%2029.1738%2051.3328%2024.2231C51.3328%2019.2724%2049.3662%2014.5244%2045.8655%2011.0237C42.3648%207.52306%2037.6169%205.5564%2032.6662%205.5564C27.7155%205.5564%2022.9675%207.52306%2019.4669%2011.0237C15.9662%2014.5244%2013.9995%2019.2724%2013.9995%2024.2231Z'%20stroke='url(%23paint1_linear_4912_14674)'%20stroke-width='2.05034'/%3e%3cpath%20d='M32.6665%2017.2231V12.5564'%20stroke='url(%23paint2_linear_4912_14674)'%20stroke-width='2.05034'/%3e%3cpath%20d='M32.6665%2035.8898V31.2231'%20stroke='url(%23paint3_linear_4912_14674)'%20stroke-width='2.05034'/%3e%3cpath%20d='M37.9165%2020.7231V19.5565C37.9165%2018.9376%2037.6707%2018.3441%2037.2331%2017.9066C36.7955%2017.469%2036.202%2017.2231%2035.5832%2017.2231H29.7498C29.131%2017.2231%2028.5375%2017.469%2028.0999%2017.9066C27.6623%2018.3441%2027.4165%2018.9376%2027.4165%2019.5565V20.6018C27.4166%2021.1326%2027.5977%2021.6475%2027.9298%2022.0615C28.262%2022.4756%2028.7254%2022.764%2029.2435%2022.8791L36.0895%2024.4005C36.6077%2024.5157%2037.071%2024.8041%2037.4032%2025.2181C37.7353%2025.6321%2037.9164%2026.147%2037.9165%2026.6778V28.8898C37.9165%2029.5086%2037.6707%2030.1021%2037.2331%2030.5397C36.7955%2030.9773%2036.202%2031.2231%2035.5832%2031.2231H29.7498C29.131%2031.2231%2028.5375%2030.9773%2028.0999%2030.5397C27.6623%2030.1021%2027.4165%2029.5086%2027.4165%2028.8898V27.7231'%20stroke='url(%23paint4_linear_4912_14674)'%20stroke-width='2.05034'/%3e%3cdefs%3e%3clinearGradient%20id='paint0_linear_4912_14674'%20x1='5'%20y1='33.5'%20x2='50'%20y2='33.5'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint1_linear_4912_14674'%20x1='5'%20y1='42.8897'%20x2='48.5'%20y2='42.8897'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint2_linear_4912_14674'%20x1='5'%20y1='17.2231'%20x2='52.5'%20y2='17.2231'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint3_linear_4912_14674'%20x1='3.5'%20y1='35.8898'%20x2='50.5'%20y2='35.8898'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3clinearGradient%20id='paint4_linear_4912_14674'%20x1='3'%20y1='31.2231'%20x2='52'%20y2='31.2231'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23246CFF'/%3e%3cstop%20offset='1'%20stop-color='%232ED888'/%3e%3c/linearGradient%3e%3c/defs%3e%3c/svg%3e){kind=small}
Lower Maintenance Costs
Turn any technician into an expert to streamline operations, maintain more assets, and reduce overall costs.
Thousands of companies manage their assets with MaintainX
'%3e%3cpath%20fill='url(%23b)'%20d='M66.008%2080.068c-5.084-.786-9.763-3.834-12.442-8.68a16.942%2016.942%200%200%201-1.87-5.18c1.096.19%202.203.476%203.298.87%206.525%202.333%2010.836%207.68%2011.014%2012.99ZM51.47%2061.576c.488-5.524%203.62-10.716%208.847-13.597a17.132%2017.132%200%200%201%2011.335-1.882c-.798%208.145-7.43%2014.848-16.038%2015.599-1.417.119-2.799.07-4.144-.12Zm28.564-11.478a17.513%2017.513%200%200%201%203.727%204.62c4.608%208.335%201.584%2018.813-6.75%2023.409a16.988%2016.988%200%200%201-4.359%201.679%2019.624%2019.624%200%200%201-3.977-12.776c.346-7.561%204.942-13.931%2011.36-16.932Z'/%3e%3cpath%20fill='%23110F0D'%20fill-rule='evenodd'%20d='M142.831%2048.324h4.977V77.03h-4.977V48.324Zm27.278%2013.002c.322%201.048.453%202.263.453%203.62v12.073h-4.787V66.208c0-.75-.047-1.572-.154-2.143-.453-2.382-1.822-3.572-4.215-3.572-2.31%200-3.882%201.274-4.43%203.476-.143.596-.226%201.405-.226%202.25v10.8h-4.787V56.623h4.477v2.989c1.536-2.5%203.906-3.43%206.371-3.43%203.488%200%206.263%201.68%207.298%205.144Zm24.636%207.323c0%203.882-2.358%206.525-5.763%207.727-1.298.453-2.632.643-4.62.643h-10.169V48.324h9.085c1.691%200%203.156.143%204.049.38%203.465.93%205.727%203.68%205.727%207.335%200%202.441-.81%204.156-2.762%205.644%202.905%201.417%204.453%203.727%204.453%206.966Zm-15.634-8.656h4.584c1.024%200%201.917-.143%202.536-.417%201.215-.548%201.905-1.608%201.905-3.167%200-1.548-.643-2.572-1.845-3.132-.691-.31-1.762-.452-2.763-.452h-4.417v7.168Zm10.716%208.465c0-1.536-.893-3.37-3.227-3.893-.428-.095-1.036-.143-1.571-.143h-5.918v8.085h5.501c.56%200%201.429-.048%201.953-.167%201.94-.453%203.262-1.846%203.262-3.882Zm47.747-11.847-8.097%2020.408h-4.429l-8.109-20.408h5.191l5.192%2014.574%205.108-14.574h5.144Zm-20.218%2010.002c0%20.69-.036%201.262-.155%201.94h-15.943c.631%202.87%202.714%204.728%205.882%204.728%202.131%200%203.607-.882%204.703-2.525h4.87c-1.762%204.144-5.204%206.692-9.657%206.692-6.084%200-10.537-4.858-10.537-10.49%200-6.108%204.524-10.776%2010.335-10.776%206.239%200%2010.442%204.954%2010.502%2010.43Zm-4.763-1.405c-.333-2.846-2.643-4.858-5.691-4.858-2.894%200-5.287%201.929-5.621%204.858h11.312Zm-72.667%203.44c0%204.787-3.287%208.371-9.419%208.371H119.363V64.66c-1.917.274-3.87.69-5.811%201.238l4.537%2011.121h-5.418l-3.596-9.585c-5.144%202.084-10.085%205.216-14.217%209.585h-4.786L101.8%2048.312h4.56l5.68%2013.883a44.112%2044.112%200%200%201%207.323-1.774V48.312h9.084c1.703%200%203.156.143%204.061.393%203.453.929%205.727%203.667%205.727%207.323%200%201.917-.738%204.179-2.81%205.691%203.06%201.56%204.501%204.025%204.501%206.93Zm-15.634-8.667a62.664%2062.664%200%200%201%202.06-.036c1.703.012%203.239.131%204.608.37%201.441-.549%202.357-1.727%202.357-3.537%200-1.941-.881-3.144-2.488-3.667-.548-.18-1.358-.286-2.322-.286h-4.215v7.156Zm-16.55%203.905-3.715-9.894-6.394%2016.502c2.833-2.595%206.263-4.858%2010.109-6.608Zm27.254%204.74c0-2.775-3.131-4.347-8.513-4.418-.715%200-1.441.011-2.191.047v8.252h5.918c2.548%200%204.786-1.37%204.786-3.882Z'%20clip-rule='evenodd'/%3e%3c/g%3e%3cdefs%3e%3clinearGradient%20id='b'%20x1='51.47'%20x2='85.916'%20y1='62.946'%20y2='62.946'%20gradientUnits='userSpaceOnUse'%3e%3cstop%20stop-color='%23CD9F28'/%3e%3cstop%20offset='1'%20stop-color='%23ECD80B'/%3e%3c/linearGradient%3e%3cclipPath%20id='a'%3e%3cpath%20fill='%23fff'%20d='M51.47%2045.728h186.104V80.14H51.47z'/%3e%3c/clipPath%3e%3c/defs%3e%3c/svg%3e)
More from Leybold
Explore Other Assets
© 2026 MaintainX. All rights reserved.