Leybold Vacuum Pump TURBOVAC 350iX DN100CF

Clean the turbomolecular pump of dust with a dry cloth if required

Check for grime inside the converter

Contact Leybold Service Department for converter cleaning if grime is detected

0.4 Hazards caused by materials and substances

Ensure the forevacuum line is tight

Check for hazardous gases escaping at leaks

Verify that gases being pumped do not react with air or humidity

Perform a leak search after installing the pump

Conduct a leak search after service work on the vacuum system

Confirm the pump's integral leak rate is < 1·10-8 mbar·l/s upon delivery

Perform regular leak searches when pumping toxic gases

4.1 Media compatibility / purge gas

WARNING — Observe Safety information 0.1.7

Record the current operating hours of the rotor unit

Has the rotor unit reached 80,000 operating hours?

Is the rotor unit operating under high pump loads?

Contact Leybold Service for rotor unit exchange

Document the contact details of the Leybold service center

Consult Leybold for recommendations on maintenance timing

Ensure vacuum chamber and components are ready for bakeout

Use flange heater for TURBOVAC bakeout

Protect rotor from direct heat radiation

Monitor temperature of components attached to forevacuum side

Is the temperature of components attached to forevacuum side below 100 °C (212 °F)?

Operate pump with water cooling during bakeout