Leybold Vacuum Pump TURBOVAC T350i DN100CF

4.1 Media compatibility / purge gas

Verify all LEDs come on sequentially and drive electronics are running up.

Read the maximum starting pressure for the turbomolecular pump from the graph in Fig. 4.1.

Switch on the turbomolecular pump via pins 7 and 8 of the socket REMOTE (X1).

Confirm the turbomolecular pump accelerates and the green LED flashes.

Does the green LED light up permanently when the pump reaches normal operation?

Ensure no shock or vibration influences are present when the pump is running.

Review Section 3.9 for additional instructions

Verify vacuum chamber and components are ready for bakeout

Check that the vacuum chamber pressure is in the range of 10-8 mbar or below

Use flange heater for TURBOVAC bakeout

Protect rotor from intensive, direct heat radiation

0.4 Hazards caused by materials and substances

Ensure the forevacuum line is tight

Check for hazardous gases escaping at leaks

Verify that gases being pumped do not react with air or humidity

Perform a leak search after installing the pump

Conduct a leak search after service work on the vacuum system

Verify the pump's integral leak rate is < 1·10-8 mbar·l/s upon delivery

Perform regular leak searches when pumping toxic gases

4.7 Removing the pump from the system

Shut down the pump and vent as described in Sections 4.4 and 4.5.

Has the pump previously handled hazardous gases?

Implement proper precautionary measures before opening the intake or exhaust connection if hazardous gases were handled.

Observe Safety Information 0.4.6.

Disconnect the pump only when it has come to a full stop.

Switch the mains power off and wait until the yellow power LED is off.

Disconnect any cable connections.