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Leybold

Leybold Vacuum Pump TURBOVAC 450iX DN160CF

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Leybold Vacuum Pump TURBOVAC 450iX DN160CF
Leybold Vacuum Pump TURBOVAC 450iX DN160CF

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Manual for Leybold Vacuum Pump TURBOVAC 450iX DN160CF

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Leybold Vacuum Pump TURBOVAC 450iX DN160CF

Leybold Vacuum Pump TURBOVAC 450iX DN160CF

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Maintenance Plans for Leybold Vacuum Pump Model TURBOVAC 450iX DN160CF

Integrate maintenance plans directly into your work orders in MaintainX.

Pump Cleaning

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Cleaning

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Clean the turbomolecular pump of dust with a dry cloth if required

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Check for grime inside the converter

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Contact Leybold Service Department for converter cleaning if grime is detected

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Cooling Water Quality Check

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Water Quality Inspection

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Check that the cooling water is free of contaminants

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Measure the suspended matter in mg/l

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Measure the particle size in µm

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Measure the electrical conductivity in µS/cm

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Measure the pH value

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Measure the total hardness in °dH

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Is aggressive carbon dioxide detectable?

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Measure the chloride concentration in mg/l

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Pump Startup Check

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Switching on

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Switch on the power supply.

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Verify all LEDs come on sequentially and drive electronics are running up.

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Enter the maximum starting pressure for the turbomolecular pump.

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Switch on the turbomolecular pump via pins 7 and 8 of the socket REMOTE (X1).

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Confirm the turbomolecular pump accelerates and the green LED flashes.

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Is the green LED lit permanently indicating normal operation?

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Safety Precautions

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Avoid influences of shock and vibration when the pump is running.

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80000 Hourly Rotor Unit Maintenance

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5 Maintenance

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Observe Safety information 0.1.7

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Exchange the rotor unit after 80,000 operating hours

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Contact Leybold Service for rotor unit maintenance

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Find the nearest Leybold service center address on www.leybold.com

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Consult Leybold for recommendations if operating under high pump loads

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Pump Bakeout Maintenance

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4.6 Bakeout

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Is the TURBOVAC equipped with a CF flange?

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Enter the current pressure in mbar

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Is the pressure in the range of 10-8 mbar or below?

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Bake out the vacuum chamber and components installed therein

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Use the flange heater to bake out the TURBOVAC

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Protect the rotor against intensive, direct heat radiation

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Enter the temperature at the forevacuum side in °C

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Is the temperature at the forevacuum side below 100 °C (212 °F)?

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Parts for Leybold Vacuum Pump TURBOVAC 450iX DN160CF

Access the parts list for your equipment in MaintainX.

Part Name
Part Number

Power Supply Turbo.Power Integra Incl. 0.3 M Cable

800100V0003

Cable Turbovac I/Ix - Turbo.Power Integra 1 M

800096V0100

Cable Turbovac I/Ix - Turbo.Power Integra 3 M

800096V0300

Cable Turbovac I/Ix - Turbo.Power Integra 5 M

800096V0500

Power Supply And Control Unit Turbo.Control 300

800100V0001

Power Supply Turbo.Power Integra Incl. 0.3 M Cable

800100V0003

Cable Turbovac I/Ix - Turbo.Power Integra 1 M

800096V0100

Cable Turbovac I/Ix - Turbo.Power Integra 3 M

800096V0300

Cable Turbovac I/Ix - Turbo.Power Integra 5 M

800096V0500

Power Supply And Control Unit Turbo.Control 300

800100V0001

Power Supply Turbo.Power Integra Incl. 0.3 M Cable

800100V0003

Cable Turbovac I/Ix - Turbo.Power Integra 1 M

800096V0100

Cable Turbovac I/Ix - Turbo.Power Integra 3 M

800096V0300

Cable Turbovac I/Ix - Turbo.Power Integra 5 M

800096V0500

Power Supply And Control Unit Turbo.Control 300

800100V0001

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