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Plasma Etch Plasma System PE200
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Manual for Plasma Etch Plasma System PE200
Complete asset maintenance, one click away
Get instant access to all the maintenance information you need. Empower technicians to perform preventive maintenance with asset packages, ready to use right out of the box.
Documents & Manuals
Find all the essential guides in one place.
Tensioning Guide- Belt-diagram
- C-120 pulleys
+ 13 more
Work Order Templates
Pre-built workflows to keep your asset running smoothly.
- Daily Electrical System Inspection
- Replace Roller and Pulley
- Install Engine B-120
+ 29 more
Procedures
Integrate maintenance plans directly into your work orders.
- Motion Industries
- Applied Industrial Technologies
- Electrical Brothers
+ 5 more
Parts
Access the parts list for your equipment in MaintainX.
- Drive Motor
- B2 Rollers
- Tensioning System
+ 40 more
Plasma Etch Plasma System PE200
Create an account to install this asset package.
Maintenance Plans for Plasma Etch Plasma System Model PE200
Integrate maintenance plans directly into your work orders in MaintainX.
1 Monthly Vacuum Chamber Seal Cleaning
Cleaning the Vacuum Chamber Door O-ring Gasket and Mating Flange Surface
Lightly wipe the O-ring with alcohol
Lightly wipe the flange surface with alcohol
Inspection of O-ring and Mating Flange
Inspect the O-ring for cuts, abrasions, or normal wear
Is replacement of the O-ring required?
Inspect the mating flange area for scratches
Is resurfacing of scratched areas required?
Resurfacing Scratched Areas
Cabinet Fan / Filter Maintenance
Filter Inspection
Inspect external filters for obstructions
Clean filters if necessary
Cabinet Fan Inspection
Inspect all cabinet fans for obstructions and excess dirt buildup
Clean cabinet fans if necessary
RF Generator Section Inspection
Open access cover to RF generator section
Ensure all air intakes are clear of obstructions
Vacuum Pump Lubrication
WARNING: Oxygen Plasma Service
Daily Oil Level Check
Check the vacuum pump oil level while at operating temperature and under full vacuum
Is the sight glass maintained at ¼ to ½ full?
Observe the oil color and clarity
Oil Replacement Reference
Reference the system manual, Section IX, 'Recommended Spare Parts List', for replacement oil type and refill capacity
Ensure the specified oil is stocked by Plasma Etch
Parts for Plasma Etch Plasma System PE200
Access the parts list for your equipment in MaintainX.
Circuit Breaker, Spst, 250Vac, 60Hz, 15A
PE- 542
Cable, Micro-Graphic, Rj12, Dl05\06\205
PE- 1400
Touch Panel, 3", Stn White
PE- 1803
Mass Flow Controller, W/Valve & Battery, 500 Sccm, 02
PE-1701
Mass Flow Controller, W/Valve & Battery, 500 Sccm, Argon
PE-1727
Circuit Breaker, Spst, 250Vac, 60Hz, 15A
PE- 542
Cable, Micro-Graphic, Rj12, Dl05\06\205
PE- 1400
Touch Panel, 3", Stn White
PE- 1803
Mass Flow Controller, W/Valve & Battery, 500 Sccm, 02
PE-1701
Mass Flow Controller, W/Valve & Battery, 500 Sccm, Argon
PE-1727
Circuit Breaker, Spst, 250Vac, 60Hz, 15A
PE- 542
Cable, Micro-Graphic, Rj12, Dl05\06\205
PE- 1400
Touch Panel, 3", Stn White
PE- 1803
Mass Flow Controller, W/Valve & Battery, 500 Sccm, 02
PE-1701
Mass Flow Controller, W/Valve & Battery, 500 Sccm, Argon
PE-1727
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Reduce Unplanned Downtime
Ensure your team follows consistent procedures to minimize equipment failures and costly delays.
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Maximize Asset Availability
Keep your assets running longer and more reliably, with standardized maintenance workflows from OEM manuals.
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